Optical Component
Quartz Crystal Wave Plate for High Power Laser

Applications

  • Semiconductor Lithography Equipment
  • High Power Laser, etc.
Applications

Features

  • "N-Grade EX," a synthetic quartz crystal of the highest purity with excellent laser resistance, is available.
  • Due to its high laser resistance using "N-Grade EX," the highest purity synthetic quartz crystal, it can maintain high transmittance even at the absorption edge in the vacuum ultraviolet region.
  • It has high transmittance in the terahertz band and can be used for medical and security applications.
  • Large sizes up to Φ200 mm (Laser grade) are available.

Class of Quartz Crystal for Quartz Crystal Wave Plates for High Power Lasers

"N-Grade EX" is the highest purity component.

Grade Inclusion Density1)
(JIS Standard)
Q3585Value2)
(JIS Standard)
Impurities (ppb) Reference Value3) Operating Temperature4)
Al Na Ca Fe Li
n-Grade EX Ⅰa Aa 19 <2 <1 <1 5 573 max
n-Grade Ⅰa A 70 60 <40 <40 <40 573 max
Laser Ⅰa C 2700 1100 140 40 800 573 max

Remarks)

  1. 1)The foreign matter density complies with JIS-C 6704. Ia grade is the product with the fewest optical inclusions.
  2. 2)The infrared absorption coefficient a value complies with JIS-C 6704. Standardized by the absorption coefficient of hydroxyl group-OH.
  3. 3)This is an example of quantitative analysis by ICP-MS. We do not guarantee the amount of impurities. It is possible to analyze and attach each gemstone upon request, but in that case an analysis fee will be charged separately.
  4. 4)Artificial quartz has a phase transition temperature of 573℃. Please use below this temperature.

Laser Resistance

N-Grade EX

N-Grade EX

Reuglar Optical Grade (JIS Grade D)

Reuglar Optical Grade (JIS Grade D)

Laser Irradiation Conditions : ArF Excimer Laser 50mJ/cm2,100Hz,1×105 shot
Device : VARIAN Measurement Wavelength:190〜800nm

UV Area Transmittance Performance

Transmittance comparison between high and low Q value

UV Area Transmittance Performance

High Durability Coating Technology

We also offer coatings that are highly resistant to lasers, with design and manufacturing methods that take laser damage into account.

Evaluation of Laser Resistance

Example of AR Coating for Laser Wave Plate (248nm)

Example of AR Coating for Laser Wave Plate (248nm)
Irradiation Beam Profile X230μm X y725μm

Irradiation Beam Profile
X230μm X y725μm

Evaluation Optics System

Evaluation Optics System

Example of AR Coating for Laser Wave Plate (532nm)

Example of AR Coating for Laser Wave Plate (532nm)
Irradiation Beam Profile X280μm X y230μm

Irradiation Beam Profile
X280μm X y230μm

Evaluation Optics System

Evaluation Optics System

Example of AR Coating for Laser Wave Plate (1064nm)

Example of AR Coating for Laser Wave Plate (1064nm)
Irradiation Beam Profile X410μm X y420μm

Irradiation Beam Profile
X410μm X y420μm

Evaluation Optics System

Evaluation Optics System

Wave Profile of Laser Pulse (10ns)

Wave Profile of Laser Pulse (10ns)

Wavelength Reflectance Laser Damaged Threshold Value Laser Pulse Shott Count Beam Size (μm)
248nm R<0.5% 40J/cm2 10ns 1000-on-1 X230 Y725
532nm R<0.5% 140J/cm2 9ns 1-on-1 X280 Y230
1064nm R<0.5% 99J/cm2 10ns 1-on-1 X410 Y420

※Laser damage threshold measurement:Laser Institute for Technology.
(These are evaluation test results and are not guaranteed values.)

Direct Bonding Technology for Lasers

To prevent deterioration of the adhesive by lasers, optical contact type wave plates without adhesive are also available for adhesive type wave plates.
The number of coatings can be reduced, and laser resistance can be improved compared to the conventional air gap type.

Direct Bonding Technology for Lasers

Standard Specifications

Applicable Wavelength λ=248~1550nm
Retardation λ/2(180deg) or λ/4(90deg)(at any wavelength λ)
Phase Accuracy +λ/200(1.8deg)(at any wavelength λ)
External Dimensions Y-cut Max. Φ50mm (N-Grade EX)
Z-cut Max. Φ89mm (N-Grade EX)
Max. Φ200mm(Laser Grade)
AR Coat Reflectance 0.25% Max.(at any wavelength λ)
Transmitted Wave Surface Accuracy P-V Value λ/4 Max. (In the Effective zone 80%)
Laser Resistance 40J/cm2 Min. (1064nm、10ns pulse typical)
Other Coating and bonding are done within our company.

External Shape

It is possible to correspond within the range of the following dimensions.
In addition, we will consider external shapes other than the following.
Holders can also be manufactured.

External Shape

Characteristics Example

Characteristics Example

Product Lineup Example

  • Circular plate and square plate are also available.
  • Polish and rap surfaces are also available.
  • Correspondence with a coat is also possible. Please provide the specificaitons.
Size Grade Cutting Angle Area Inclusion Density Class α3585Value Class Surface Accuracy Principal Surface Angle Accuracy
φD(mm) t(mm)
15 2.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
15 2.0 N-Grade Y or X Z Area Ⅰa A λ/4(@632.8nm) 0° 00' ±10'
15 2.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
15 3.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
15 3.0 N-Grade Y or X Z Area Ⅰa A λ/4(@632.8nm) 0° 00' ±10'
15 3.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
20 2.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
20 2.0 N-Grade Y or X Z Area Ⅰa A λ/4(@632.8nm) 0° 00' ±10'
20 2.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
20 3.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
20 3.0 N-Grade Y or X Z Area Ⅰa A λ/4(@632.8nm) 0° 00' ±10'
20 3.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
25 2.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
25 2.0 N-Grade Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
25 3.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
25 3.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
30 2.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
30 2.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
30 3.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
30 3.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
40 4.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/4(@632.8nm) 0° 00' ±10'
40 4.0 Laser Y or X Z Area Ⅰa C λ/4(@632.8nm) 0° 00' ±10'
50 5.0 N-Grade EX Y or X Z Area Ⅰa Aa λ/2(@632.8nm) 0° 00' ±10'
75 Max. 20.0 No Regulation X +X Area Ⅰa C λ/2(@632.8nm) 0° 00' ±10'
100 Max. 20.0 No Regulation X +X Area Ⅰa C - 0° 00' ±10'
150 Max. 25.0 No Regulation X +X and Z Area Ⅱ (Within 100φ is Ⅰa) C - 0° 00' ±10'

Contact Us

*Please inquire for special specifications.

Warranty Items

Test items include temperature, humidity, impact resistance, heat resistance, etc. for the environmental and mechanical properties of optical components.
We set test items and conditions for each component and guarantee the properties of the component. However, warranty items and conditions vary depending on the shape, properties, application, and environment of the optical component.

Subjected to High Temperature 85℃ 1000H
Subjected to Low Temperature -40℃ 1000H
Subjected to High Temperature and High Humidity 60℃90%RH~95%RH 1000H
Heat Shock -40℃ 2H 、85℃ 2H、100℃/H 10 Cycles
Subjected to Thermal Shock -40℃/85℃ 30 Minutes Each 30 Cycles
Coating Adhesion Strength Cellophane tape (LP-18) is applied to the component, rubbed with the fingers three times, and then quickly pulled off in a vertical direction ten times
Abrasion Resistance The vapor-deposited surface is pressed with lens-cleaning paper (DUSPER K-3) with a pressing pressure of 4.9 N/cm2 (500 gf/cm2)
1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips
Solvent Resistance Test Using lens-cleaning paper (DUSPEP K-3) in solvents such as IPA, acetone, ethanol, etc. with 2.94 N (300 gf)
1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips
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