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Applications
- Semiconductor Lithography Equipment
- High Power Laser, etc.
Features
- "N-Grade EX," a synthetic quartz crystal of the highest purity with excellent laser resistance, is available.
- Due to its high laser resistance using "N-Grade EX," the highest purity synthetic quartz crystal, it can maintain high transmittance even at the absorption edge in the vacuum ultraviolet region.
- It has high transmittance in the terahertz band and can be used for medical and security applications.
- Large sizes up to Φ200 mm (Laser grade) are available.
Class of Quartz Crystal for Quartz Crystal Wave Plates for High Power Lasers
"N-Grade EX" is the highest purity component.
| Grade |
Inclusion Density1) (JIS Standard) |
Q3585Value2) (JIS Standard) |
Impurities (ppb) Reference Value3) | Operating Temperature4) | ||||
|---|---|---|---|---|---|---|---|---|
| Al | Na | Ca | Fe | Li | ||||
 |
Ⅰa | Aa | 19 | <2 | <1 | <1 | 5 | 573 max |
 |
Ⅰa | A | 70 | 60 | <40 | <40 | <40 | 573 max |
| Laser | Ⅰa | C | 2700 | 1100 | 140 | 40 | 800 | 573 max |
Remarks)
- 1）The foreign matter density complies with JIS-C 6704. Ia grade is the product with the fewest optical inclusions.
- 2）The infrared absorption coefficient a value complies with JIS-C 6704. Standardized by the absorption coefficient of hydroxyl group-OH.
- 3）This is an example of quantitative analysis by ICP-MS. We do not guarantee the amount of impurities. It is possible to analyze and attach each gemstone upon request, but in that case an analysis fee will be charged separately.
- 4）Artificial quartz has a phase transition temperature of 573℃. Please use below this temperature.
Laser Resistance
N-Grade EX
Reuglar Optical Grade (JIS Grade D)
Laser Irradiation Conditions : ArF Excimer Laser 50mJ/cm2,100Hz,1×105 shot
Device : VARIAN Measurement Wavelength：190〜800nm
UV Area Transmittance Performance
Transmittance comparison between high and low Q value
High Durability Coating Technology
We also offer coatings that are highly resistant to lasers, with design and manufacturing methods that take laser damage into account.
Evaluation of Laser Resistance
Example of AR Coating for Laser Wave Plate (248nm)
[ Laser Damaged Threshold Value: 40J/cm2 ]
Irradiation Beam Profile
X230μm X y725μm
Evaluation Optics System
Example of AR Coating for Laser Wave Plate (532nm)
[ Laser Damaged Threshold Value: 140J/cm2 ]
Irradiation Beam Profile
X280μm X y230μm
Evaluation Optics System
Example of AR Coating for Laser Wave Plate (1064nm)
[ Laser Damaged Threshold Value: 99J/cm2 ]
Irradiation Beam Profile
X410μm X y420μm
Evaluation Optics System
Wave Profile of Laser Pulse (10ns)
| Wavelength | Reflectance | Laser Damaged Threshold Value | Laser Pulse | Shott Count | Beam Size (μm) |
|---|---|---|---|---|---|
| 248nm | R<0.5% | 40J/cm2 | 10ns | 1000-on-1 | X230 Y725 |
| 532nm | R<0.5% | 140J/cm2 | 9ns | 1-on-1 | X280 Y230 |
| 1064nm | R<0.5% | 99J/cm2 | 10ns | 1-on-1 | X410 Y420 |
※Laser damage threshold measurement：Laser Institute for Technology.
(These are evaluation test results and are not guaranteed values.)
Direct Bonding Technology for Lasers
To prevent deterioration of the adhesive by lasers, optical contact type wave plates without adhesive are also available for adhesive type wave plates.
The number of coatings can be reduced, and laser resistance can be improved compared to the conventional air gap type.
Standard Specifications
| Applicable Wavelength | λ=248～1550nm |
|---|---|
| Retardation | λ/2(180deg) or λ/4(90deg)(at any wavelength λ) |
| Phase Accuracy | +λ/200(1.8deg)(at any wavelength λ) |
| External Dimensions | Y-cut Max. Φ50mm (N-Grade EX) Z-cut Max. Φ89mm (N-Grade EX) Max. Φ200mm(Laser Grade) |
| AR Coat Reflectance | 0.25% Max.(at any wavelength λ) |
| Transmitted Wave Surface Accuracy P-V Value | λ/4 Max. (In the Effective zone 80%) |
| Laser Resistance | 40J/cm2 Min. (1064nm、10ns pulse typical) |
| Other | Coating and bonding are done within our company. |
External Shape
It is possible to correspond within the range of the following dimensions.
In addition, we will consider external shapes other than the following.
Holders can also be manufactured.
Characteristics Example
Product Lineup Example
- Circular plate and square plate are also available.
- Polish and rap surfaces are also available.
- Correspondence with a coat is also possible. Please provide the specificaitons.
| Size | Grade | Cutting Angle | Area | Inclusion Density Class | α3585Value Class | Surface Accuracy | Principal Surface Angle Accuracy | |
|---|---|---|---|---|---|---|---|---|
| φD(mm) | t(mm) | |||||||
| 15 | 2.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 15 | 2.0 | N-Grade | Y or X | Z Area | Ⅰa | A | λ/4(@632.8nm) | 0° 00' ±10' |
| 15 | 2.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 15 | 3.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 15 | 3.0 | N-Grade | Y or X | Z Area | Ⅰa | A | λ/4(@632.8nm) | 0° 00' ±10' |
| 15 | 3.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 2.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 2.0 | N-Grade | Y or X | Z Area | Ⅰa | A | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 2.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 3.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 3.0 | N-Grade | Y or X | Z Area | Ⅰa | A | λ/4(@632.8nm) | 0° 00' ±10' |
| 20 | 3.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 25 | 2.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 25 | 2.0 | N-Grade | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 25 | 3.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 25 | 3.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 30 | 2.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 30 | 2.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 30 | 3.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 30 | 3.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 40 | 4.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/4(@632.8nm) | 0° 00' ±10' |
| 40 | 4.0 | Laser | Y or X | Z Area | Ⅰa | C | λ/4(@632.8nm) | 0° 00' ±10' |
| 50 | 5.0 | N-Grade EX | Y or X | Z Area | Ⅰa | Aa | λ/2(@632.8nm) | 0° 00' ±10' |
| 75 | Max. 20.0 | No Regulation | X | +X Area | Ⅰa | C | λ/2(@632.8nm) | 0° 00' ±10' |
| 100 | Max. 20.0 | No Regulation | X | +X Area | Ⅰa | C | - | 0° 00' ±10' |
| 150 | Max. 25.0 | No Regulation | X | +X and Z Area | Ⅱ (Within 100φ is Ⅰa) | C | - | 0° 00' ±10' |
*Please inquire for special specifications.
Warranty Items
Test items include temperature, humidity, impact resistance, heat resistance, etc. for the environmental and mechanical properties of optical components.
We set test items and conditions for each component and guarantee the properties of the component. However, warranty items and conditions vary depending on the shape, properties, application, and environment of the optical component.
| Subjected to High Temperature | 85℃ 1000H |
|---|---|
| Subjected to Low Temperature | -40℃ 1000H |
| Subjected to High Temperature and High Humidity | 60℃90％RH～95%RH 1000H |
| Heat Shock | -40℃ 2H 、85℃ 2H、100℃/H 10 Cycles |
| Subjected to Thermal Shock | -40℃/85℃ 30 Minutes Each 30 Cycles |
| Coating Adhesion Strength | Cellophane tape (LP-18) is applied to the component, rubbed with the fingers three times, and then quickly pulled off in a vertical direction ten times |
| Abrasion Resistance | The vapor-deposited surface is pressed with lens-cleaning paper (DUSPER K-3) with a pressing pressure of 4.9 N/cm2 (500 gf/cm2)
1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips |
| Solvent Resistance Test | Using lens-cleaning paper (DUSPEP K-3) in solvents such as IPA, acetone, ethanol, etc. with 2.94 N (300 gf) 1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips |
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