Product Lineup

QCM Real-Time Process Monitor

Evaluating Technical Suitability for Manufacturing Sites

We are developing a new monitor for process gas monitoring by applying our proven QCM (Quartz Crystal Microbalance) technology, which has a track record in our outgassing analyzers.
This product is not an entirely new development; it achieves both reliability and applicability through the lateral application of existing technology.

We are currently verifying the technical suitability of this monitor within actual manufacturing processes. For interested companies, we provide evaluation units and technical support.
Please feel free to contact us for further details.

Primary Applications

Real-time process monitoring in semiconductor manufacturing (front-end) processes

Cleanliness monitoring inside vacuum chambers

Trace moisture measurement

Twin-QCM^® Sensor

Photo 1: Twin-QCM^® Sensor (NW25 Type)

Photo 2: NW25 Flange Mounting

Photo 3: Twin-QCM^® Sensor
(Chamber-Mounted Type)

Photo 4: Quartz Crystal Sensor

Photo 5: Quartz Crystal Sensor
(Alumina Electrode Type)

Features

Two electrodes for detection and reference are configured on a single quartz crystal. Enables highly stable measurements.

Directly mountable on NW25 flanges (Photo 2)
＊Evaluation sensors suitable for installation inside vacuum chambers are also available (Photo 3)

Alumina-coated quartz crystal sensors enabling measurement in reactive etching environments are available as an option (Photo 5)

Specification

Twin-QCM^® Sensor Module (NW25 Type)	Model：PSA-QM-1008
Output Frequency	10.278MHz（Fundamental） 30.833MHz（3ot）
Mass Sensitivity	2.39×10⁸ (Hz/g) cm²（Fundamental） 7.17×10⁸ (Hz/g) cm²（3ot）
Frequency Sensitivity	0.53ng/Hz（Fundamental） 0.18ng/Hz（3ot）
Sensor Electrode Area	0.1257 cm²（Per Electrode）
Sensor Electrode Material	Au（Al₂O₃,PI, etc., Compatible）
Temperature Sensor	Platinum Resistance Thermonmeter Pt1000 Class F0.3
Operating Temperature Range	0℃ to +80℃
Differential Frequency Temperature Characteristics	Within ±10 ppm (From -25℃ to +80℃, with +25℃ as the Reference Point)
Peltier Power	≦ 9W
Peltier Cooling Performance	⊿T≧50℃（Heat Sink Temperature+25℃、10^-4Pa）
Oscillation Circuit Power	≦ 0.5W
External Dimensions	Φ40.0×27.3(H)mm（Excluding Protrusions）
Weight	≦ 50g
Enclosure Material	Aluminum (Anodized)
Measurement Field of View	70゜（Harf Angle）
Pressure Range	Atmospheric Pressure to High Vacuum（10^-4Pa）

Appearance Diagram

Unit：mm

2-Channel Controller

The 2 channel controller is a basic unit that connects to Twin-QCM^® sensors to perform temperature control and monitoring of QCM signals.

Features

Multi channel support for independent control of up to two sensors

Supports high speed measurement at 100 ms intervals and enables on-site measurement

Compact

Specification

Twin-QCM^®Controller	PSA-QS-100x
Number of Sensors for Simultaneous Measurement	≦ 2
Module Control Distance	Max20m
Frequcny Detection Accuracy	≦ 1 ppm
Frequcny Measurement Resolution	0.01Hz
Temperature Detection Accuracy	≦ ±0.3℃
Indication Temp. Range	-200℃ to +200℃
Temperature Measurement Resolution	0.1℃
Number of Temperature Programs Segments	4
Number of Temperature Control Segments	32
RAMP Rate (Temperature Gradient)	0.1 to 20.0℃ / Min (in 0.1℃ Units)
SOAK (Constant Temperature Control)	1 Minute to 99 Houres 59 Minutes (in 1 Minute Units)
Measurement Interval	100ms, 1s
Operating Temperature Range	+0 to 50℃
Power Supply Voltage^＊	DC24V
Power Consumption	≦ 35W (When Two Sensor Modules are Connected)
External Dimensions	225(W) × 125(D) × 66.5(H) mm （Excluding Protrusions）
Weight	1.3kg