Optical Component
Quartz Crystal Wave Plate for High Power Laser

Applications

  • Semiconductor Lithography Equipment
  • High Power Laser, etc.
Applications

Features

  • "N-Grade EX," a synthetic quartz crystal of the highest purity with excellent laser resistance, is available.
  • Due to its high laser resistance using "N-Grade EX," the highest purity synthetic quartz crystal, it can maintain high transmittance even at the absorption edge in the vacuum ultraviolet region.
  • It has high transmittance in the terahertz band and can be used for medical and security applications.
  • Large sizes up to Φ200 mm (Laser grade) are available.

Class of Quartz Crystal for Quartz Crystal Wave Plates for High Power Lasers

"N-Grade EX" is the highest purity component.

Grade Inclusion Density1)
(JIS Standard)
Q3585Value2)
(JIS Standard)
Impurities (ppb) Reference Value3) Operating Temperature4)
Al Na Ca Fe Li
n-Grade EX Ⅰa Aa 19 <2 <1 <1 5 573 max
n-Grade Ⅰa A 70 60 <40 <40 <40 573 max
Laser Ⅰa C 2700 1100 140 40 800 573 max

Remarks)

  1. 1)The foreign matter density complies with JIS-C 6704. Ia grade is the product with the fewest optical inclusions.
  2. 2)The infrared absorption coefficient a value complies with JIS-C 6704. Standardized by the absorption coefficient of hydroxyl group-OH.
  3. 3)This is an example of quantitative analysis by ICP-MS. We do not guarantee the amount of impurities. It is possible to analyze and attach each gemstone upon request, but in that case an analysis fee will be charged separately.
  4. 4)Artificial quartz has a phase transition temperature of 573℃. Please use below this temperature.

Laser Resistance

N-Grade EX

N-Grade EX

Reuglar Optical Grade (JIS Grade D)

Reuglar Optical Grade (JIS Grade D)

Laser Irradiation Conditions : ArF Excimer Laser 50mJ/cm2,100Hz,1×105 shot
Device : VARIAN Measurement Wavelength:190〜800nm

UV Area Transmittance Performance

Transmittance comparison between high and low Q value

UV Area Transmittance Performance

High Durability Coating Technology

We also offer coatings that are highly resistant to lasers, with design and manufacturing methods that take laser damage into account.

Evaluation of Laser Resistance

Example of AR Coating for Laser Wave Plate (248nm)
[ Laser Damaged Threshold Value: 40J/cm2 ]

Example of AR Coating for Laser Wave Plate (248nm)
Irradiation Beam Profile X230μm X y725μm

Irradiation Beam Profile
X230μm X y725μm

Evaluation Optics System

Evaluation Optics System

Example of AR Coating for Laser Wave Plate (532nm)
[ Laser Damaged Threshold Value: 140J/cm2 ]

Example of AR Coating for Laser Wave Plate (532nm)
Irradiation Beam Profile X280μm X y230μm

Irradiation Beam Profile
X280μm X y230μm

Evaluation Optics System

Evaluation Optics System

Example of AR Coating for Laser Wave Plate (1064nm)
[ Laser Damaged Threshold Value: 256J/cm2 ]

Example of AR Coating for Laser Wave Plate (1064nm)
Irradiation Beam Profile X480μm X Y510μm

Irradiation Beam Profile
X480μm X Y510μm

Evaluation Optics System

Evaluation Optics System

Wave Profile of Laser Pulse (10ns)

Wave Profile of Laser Pulse (10ns)

Wavelength Reflectance Laser Damaged Threshold Value Laser Pulse Shot Count Beam Size (μm)
193nm R<0.5% 33J/cm2 10ns 1-on-1 X190 Y640
248nm R<0.5% 40J/cm2 10ns 1000-on-1 X230 Y725
355nm R<0.5% 92J/cm2 8ns 1-on-1 X170 Y160
532nm R<0.5% 140J/cm2 9ns 1-on-1 X280 Y230
1064nm R<0.5% 256J/cm2 10ns 1-on-1 X410 Y510

※Laser damage threshold measurement:Laser Institute for Technology.
(These are evaluation test results and are not guaranteed values.)

Direct Bonding Technology for Lasers

To prevent deterioration of the adhesive by lasers, optical contact type wave plates without adhesive are also available for adhesive type wave plates.
The number of coatings can be reduced, and laser resistance can be improved compared to the conventional air gap type.

Direct Bonding Technology for Lasers

Standard Specifications

Applicable Wavelength λ=193~1550nm
Retardation λ/2(180deg) or λ/4(90deg)(at any wavelength λ)
Phase Accuracy ±λ/200(at any wavelength λ)
External Dimensions X,Y-cut Max. Φ50mm (N-Grade EX)
Z-cut Max. Φ89mm (N-Grade EX)
Max. Φ200mm(Laser Grade)
Surface Quality[ISO 10110] 10-5
AR Coat Reflectance 0.25% Max.(at any wavelength λ)
Transmitted Wave Surface Accuracy P-V Value λ/10 Max. (In the Effective zone 80%)
Laser Damage Threshold (Measured Example) 256J/cm2 Min. (1064nm、10ns 1-on-1 pulse typical)
Other Coating and bonding are done within our company.

Laser damage threshold measurement : Laser Institute for Technology.(These are evaluation test results and are not guaranteed values.)

External Shape

It is possible to correspond within the range of the following dimensions.
In addition, we will consider external shapes other than the following.
Holders can also be manufactured.

External Shape

Characteristics Example

Characteristics Example

Product Lineup

           
Wavelength(nm) Frame Outer Dimensions(mm) Effective Diameter(mm) Frame Thickness(mm) Retardation(deg) Damage Threshold Pulsed(J/cm2) Product Code
193 DIA25.4 14.9 10 90 30 EAS00A-01225
193 DIA30.0 19.5 10 90 30 EAS00A-01226
193 DIA50.8 37 10 90 30 EAS00A-01227
193 DIA25.4 14.9 10 180 30 EAS00A-01228
193 DIA30.0 19.5 10 180 30 EAS00A-01229
193 DIA50.8 37 10 180 30 EAS00A-01230
248 DIA25.4 14.9 10 90 40 EAS00A-01325
248 DIA30.0 19.5 10 90 40 EAS00A-01326
248 DIA50.8 37 10 90 40 EAS00A-01327
248 DIA25.4 14.9 10 180 40 EAS00A-01328
248 DIA30.0 19.5 10 180 40 EAS00A-01329
248 DIA50.8 37 10 180 40 EAS00A-01330
266 DIA25.4 14.9 10 90 - EAS00A-01231
266 DIA30.0 19.5 10 90 - EAS00A-01232
266 DIA50.8 37 10 90 - EAS00A-01233
266 DIA25.4 14.9 10 180 - EAS00A-01234
266 DIA30.0 19.5 10 180 - EAS00A-01235
266 DIA50.8 37 10 180 - EAS00A-01236
355 DIA25.4 14.9 10 90 92 EAS00A-01237
355 DIA30.0 19.5 10 90 92 EAS00A-01238
355 DIA50.8 37 10 90 92 EAS00A-01239
355 DIA25.4 14.9 10 180 92 EAS00A-01240
355 DIA30.0 19.5 10 180 92 EAS00A-01241
355 DIA50.8 37 10 180 92 EAS00A-01242
532 DIA25.4 14.9 10 90 140 EAS00A-01243
532 DIA30.0 19.5 10 90 140 EAS00A-01244
532 DIA50.8 37 10 90 140 EAS00A-01245
532 DIA25.4 14.9 10 180 140 EAS00A-01246
532 DIA30.0 19.5 10 180 140 EAS00A-01247
532 DIA50.8 37 10 180 140 EAS00A-01248
1,064 DIA25.4 14.9 10 90 256 EAS00A-01249
1,064 DIA30.0 19.5 10 90 256 EAS00A-01250
1,064 DIA50.8 37 10 90 256 EAS00A-01251
1,064 DIA25.4 14.9 10 180 256 EAS00A-01252
1,064 DIA30.0 19.5 10 180 256 EAS00A-01253
1,064 DIA50.8 37 10 180 256 EAS00A-01254
1,550 DIA25.4 14.9 10 90 - EAS00A-01255
1,550 DIA30.0 19.5 10 90 - EAS00A-01256
1,550 DIA50.8 37 10 90 - EAS00A-01257
1,550 DIA25.4 14.9 10 180 - EAS00A-01258
1,550 DIA30.0 19.5 10 180 - EAS00A-01259
1,550 DIA50.8 37 10 180 - EAS00A-01260

※Laser damage threshold measurement:Laser Institute for Technology.
(These are evaluation test results and are not guaranteed values.)

Purchase Information

The products listed in our Product Lineup are also available on Meetoptics, an online marketplace for optical products.
→Our products on MEETOPTICS
https://www.meetoptics.com/optics/all?Supplier__t_s=NDK

Contact Us

*Please inquire about products not listed above

Warranty Items

Test items include temperature, humidity, impact resistance, heat resistance, etc. for the environmental and mechanical properties of optical components.
We set test items and conditions for each component and guarantee the properties of the component. However, warranty items and conditions vary depending on the shape, properties, application, and environment of the optical component.

Subjected to High Temperature 85℃ 1000H
Subjected to Low Temperature -40℃ 1000H
Subjected to High Temperature and High Humidity 60℃90%RH~95%RH 1000H
Heat Shock -40℃ 2H 、85℃ 2H、100℃/H 10 Cycles
Subjected to Thermal Shock -40℃/85℃ 30 Minutes Each 30 Cycles
Coating Adhesion Strength Cellophane tape (LP-18) is applied to the component, rubbed with the fingers three times, and then quickly pulled off in a vertical direction ten times
Abrasion Resistance The vapor-deposited surface is pressed with lens-cleaning paper (DUSPER K-3) with a pressing pressure of 4.9 N/cm2 (500 gf/cm2)
1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips
Solvent Resistance Test Using lens-cleaning paper (DUSPEP K-3) in solvents such as IPA, acetone, ethanol, etc. with 2.94 N (300 gf)
1 round-trip/second continuous, round-trip distance 10 mm, 100 round-trips
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