High purity quartz crystal wave plates for stepper applications achieve highly efficient processing by controlling laser polarization and can be used as optical elements with long life and high reliability by using synthetic quartz crystals manufactured using our proprietary high purity growing technology.

① By using our proprietary high purity synthetic quartz crystals, we guarantee high transmittance even in the vacuum ultraviolet region, including wavelengths of 193 nm.

② By using our proprietary high purity synthetic quartz crystals, we guarantee high laser resistance and long life.

Laser Irradiation Conditions : ArF Excimer Laser　50mJ/cm2,100Hz,1×10⁵ shot
Device : VARIAN　Measurement Wavelength : 190～800nm