Semiconductor Lithography Equipment（Stepper）
Optical Component Used
Role of Optical Components
High purity quartz crystal wave plates for stepper applications achieve highly efficient processing by controlling laser polarization and can be used as optical elements with long life and high reliability by using synthetic quartz crystals manufactured using our proprietary high purity growing technology.
① By using our proprietary high purity synthetic quartz crystals, we guarantee high transmittance even in the vacuum ultraviolet region, including wavelengths of 193 nm.
■Transmittance Data（140～300mm） N-Grade EX and N-Grade grade products maintain high transmittance up to the absorption edge.
② By using our proprietary high purity synthetic quartz crystals, we guarantee high laser resistance and long life.
Reuglar Optical Grade (JIS Grade D)
Laser Irradiation Conditions : ArF Excimer Laser 50mJ/cm2,100Hz,1×105 shot
Device : VARIAN Measurement Wavelength : 190～800nm